The InSEM is a tool for characterizing the mechanical properties of surfaces or structures, which is designed to function with sub-nanometer resolution in an in-situ vacuum environment such as an SEM or FIB.The InSEM is designed to seamlessly integrate high-resolution mechanical testing capabilities into SEM or FIB. The InSEM is designed to be modular and flexible, to enable a wide range of applications. Port availability on SEM/FIB chambers is often an issue. We’ve designed the InSEM to mount to a variety of ports, or to be mounted directly on the SEM stage. As different applications call for different system configurations, the InSEM can easily be moved from one port to another, or assembled into the on-stage configuration.Nanomechanics, Inc. provides a variety of tools for use in mechanical properties testing for the SEM/FIB or vacuum environment. All of our devices and software are designed to be modular, easy-to-use, and high-performance.The Nanomechanics InForce actuators utilize patent-pending voice-coil force generation and capacitive displacement resolution to achieve the best dynamic range in the industry. With 50mN of force, the InForce 50 enables a wide range of compressive, tensile, and indentation testing. The dynamic characteristics of the head mean that low-noise, stability, and closed-loop control are inherent to the design, whether operating in quasi-static or dynamic modes.Nanomechanics’ InView software provides the user with exceptional control of the experiment, while removing complex control tasks to the background for ease-of-use and rapid ramp-up time for new users. InView integrates the SEM video and the nanomechanical data for complete synchronization. Reviewing data is simple, and InView makes it easy to generate presentation-ready plots immediately.Nanomechanics’ InQuest Controller provides quasi-static and dynamic control in the same compact footprint enclosure, which can be run by laptops or all-in-one computers. InQuest can acquire data at speeds up to 100 kHz. With an industry-leading dynamic range, displacement ranges of over 50 microns can be measured with precision below 0.05nm.The InSEM III utilizes a stage-mounted cradle and micropositioners to position a sample relative to the InForce actuator. Designed to maximize frame stiffness while optimizing positioning resolution, the InSEM III provides versatile on-stage testing capabilities for applications in which the on-chamber configuration is limiting.