Title: "Bias magnetron sputtering for niobium thin films"
Authors: LANZA G. and PALMIERI V. and BEMPORAD E. and CARASSITI F. and SEBASTIANI M . and PADAMSEE H. and FRIGO A. and MINARELLO A.
Published in: Laboratori Nazionali di Legnaro, INFN-LNL, Annual Report 2007
Volume #: -
Pages: -
Pub Year: 2007
ISSN: 1828-8545
DOI:
Publication Type: paper in a journal