Title:
"Bias magnetron sputtering for niobium thin films"
Authors: LANZA G. and PALMIERI V. and BEMPORAD E. and CARASSITI F. and SEBASTIANI M . and PADAMSEE H. and FRIGO A. and MINARELLO A. Published in: Laboratori Nazionali di Legnaro, INFN-LNL, Annual Report 2007 Volume #: - Pages: - Pub Year: 2007 ISSN: 1828-8545 DOI: Publication Type: paper in a journal |
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