Title: "Integrated approach for high resolution surface characterization: coupling focused ion beam with micro and nano mechanical tests" Authors: Bemporad E. and Sebastiani M. and Palmieri V. and Deambrosis S. Published in: 15th International Conference on Condensed Matter Nuclear Science Volume #: - Pages: - Pub Year: 2009 ISSN: 978-88-8286-256-5 DOI: Publication Type: paper in conference proceedings