Title: "A new methodology for in-situ residual stress measurement in MEMS structures" Authors: Sebastiani M. and bemporad E. and Rizzi L. and melone g. and Korsunsky A.M. Published in: 11th International Workshop on Stress-Induced Phenomena in Metallization Volume #: - Pages: - Pub Year: 2010 ISSN: DOI: Publication Type: poster at a conference