Title: "High resolution stress analysis on thin coatings and MEMS by a new FIB-DIC method" Authors: M. Sebastiani, E. Bemporad, F. Carassiti Published in: 9th SYMPOSIUM OF EUROPEAN VACUUM COATERS ANZIO 2010 Oct.4th - Oct.6th 2010 Volume #: - Pages: - Pub Year: 2010 ISSN: DOI: Publication Type: oral contribution at a conference