Title: "A New Methodology For In-Situ Residual Stress Measurement In MEMS Structures" Authors: M. Sebastiani, E. Bemporad, G. Melone, L. Rizzi, A. M. Korsunsky Published in: AIP conference proceedings Volume #: 1300 Pages: 120-126 Pub Year: 2010 ISSN: DOI: http://10.1063/1.3527116, http://10.1063/1.3527116 Publication Type: paper in conference proceedings