Title: "Depth-resolved Residual Stress Analysis of Thin Coatings by a New FIB-DIC Method" Authors: Marco Sebastiani, Edoardo Bemporad, Christoph Eberl, George M. Pharr Published in: 2010 MRS Fall Metting, Boston (MA), Novenber 29-December 3 2010 Volume #: - Pages: - Pub Year: 2010 ISSN: DOI: Publication Type: oral contribution at a conference