Title: "Depth-resolved residual stress analysis of thin coatings by a new FIB-DIC method" Authors: M. Sebastiani, C. Eberl, E. Bemporad, G. M. Pharr Published in: Materials Science and Engineering: A Volume #: 528 (27) Pages: 7901-7908 Pub Year: 2011 ISSN: DOI: http://10.1016/j.msea.2011.07.001, http://10.1016/j.msea.2011.07.001 Publication Type: paper in a journal