Title: "Innovative FIB relaxation methods for residual stress depth profiling in thin coatings" Authors: M. Sebastiani, C. Eberl, E. Bemporad, G. M. Pharr Published in: VIII Coinvegno INSTM sulla Scienza e Tecnologia dei Materiali, Aci Castello (CT) 26-29 Giugno 2011 Volume #: - Pages: - Pub Year: 2011 ISSN: DOI: Publication Type: poster at a conference