Title: "Residual stress measurement in thin films using the semi-destructive ring-core drilling method using Focused Ion Beam" Authors: X. Song, K.B. Yeap, J. Zhu, J. Belnoue, M. Sebastiani, E. Bemporad, K.Y. Zeng, A.M. Korsunsky Published in: Procedia Engineering Volume #: Volume 10 Pages: 2190-2195 Pub Year: 2011 ISSN: 1877-7058 DOI: Publication Type: paper in a journal