Title: "Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging" Authors: Xu Song; Kong Boon Yeap; Jing Zhu; Jonathan Belnoue; Marco Sebastiani; Edoardo Bemporad; Kaiyang Zeng; Alexander Korsunsky Published in: Thin Solid Films Volume #: 520 Pages: 2073-2076 Pub Year: 2012 ISSN: DOI: Publication Type: paper in a journal