Title: " Effects of Residual Stress on Nano-Mechanical Behaviour of Thin Films" Authors: Sebastiani M, Bemporad E, Schwarzer N, Carassiti F Published in: Series Editor: G.M.L. Gladwell. Editor: Atul Tiwari, Nanomechanical Analysis of High Performance Materials Volume #: 6557 Pages: 263-284 Pub Year: 2013 ISSN: ISBN: 978-94-007-6919-9 DOI: Publication Type: paper in a book