Title: "Stoichiometry Gap in MF Sputtered CrON Thin Films"
Authors: M.Renzelli, M.Fenker, H.Kappl,E.Bemporad
Published in: ICMCTF 2014
Volume #: -
Pages: -
Pub Year: 2014
ISSN:
DOI:
Publication Type: oral contribution at a conference