Title: "Depth profiling and morphological characterization of AlN thin films deposited on Si substrates using a reactive sputter magnetron" Authors: Macchi C, Burgi J, Garcıa Molleja J, Mariazzi S, Piccoli M, Bemporad E, Feugeas J, Sennen Brusa R, Somoza A Published in: European Physical Journal Applied Physics Volume #: 67 Pages: 21301-9 Pub Year: 2014 ISSN: DOI: http://10.1051/epjap/2014140191, http://10.1051/epjap/2014140191 Publication Type: paper in a journal