Title: "A critical comparison between XRD and FIB residual stress measurement techniques in thin films" Authors: Gelfi m, Bemporad E, Brisotto M, Depero LE, Korsunsky AM, Lunt AJ, Sebastiani M Published in: Proceedings of the 41st International Conference on Metallurgical Coatings and Thin Films Volume #: Symposia C Pages: TS2-TS4-TS6 Pub Year: 2014 ISSN: DOI: Publication Type: paper in conference proceedings