Title: "A critical comparison between XRD and FIB residual stress measurement techniques in thin films" Authors: Bemporad E, Brisotto M, Depero L E, Gelfi M, Korsunsky A M, Lunt A J G, Sebastiani M Published in: Thin Solid Films Volume #: 572 Pages: 224-231 Pub Year: 2014 ISSN: DOI: http://10.1016/j.tsf.2014.09.053, http://10.1016/j.tsf.2014.09.053 Publication Type: paper in a journal